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Handbook of Plasma Processing Technology


Handbook of Plasma Processing TechnologyAuthor: Rossnagel, Cuomo, and Westwood
Category: Microelectronics

Table of content (PDF)

Language: en
Copyright: 1990
Specifications:
Pages: 523
6 x 9, Hardcover
ISBN: 0-8155-1220-1

Content:

This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

Prices:

List price: 122,00 US$
Please ask for recent prices in Euro and shipping costs.

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