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Handbook of Plasma Processing Technology

Handbook of Plasma Processing TechnologyAuthor: Rossnagel, Cuomo, and Westwood
Category: Microelectronics

Table of content (PDF)

Language: en
Copyright: 1990
Pages: 523
6 x 9, Hardcover
ISBN: 0-8155-1220-1


This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.


List price: 122,00 US$
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